OEM-Quality CMP Parts
Ready When You Need Them
Zyon Technologies maintains an extensive inventory of spare parts, sub-assemblies, and consumables for all major CMP and post-CMP platforms.
Every part meets or exceeds OEM specifications and is backed by ISO 9001:2015 quality standards and a 90-day warranty.
If a component isn’t in stock, our global sourcing network allows us to locate and ship most parts quickly — keeping your tools online and your operations running.
Search Part Availability
Enter one or multiple part numbers separated by commas or spaces.
Downloadable Parts Lists
Browse Parts by Tool Set
Select the list for your CMP platform below. Each spreadsheet includes part numbers, descriptions, and ordering details.
To request pricing or confirm availability, submit the form on the contact page or contact sales at (480) 988-2815.
How to Order
RFQ→ Quote→ PO→ Delivery
Request a Quote (RFQ): Send part numbers or tool details through our online form.
Receive a Quote: We’ll confirm availability, pricing, and lead time.
Submit PO or Payment: We accept purchase orders and can process credit-card transactions if preferred.
Shipment: All orders ship FOB Chandler, AZ. International customers may pre-pay freight or arrange their own shipping.
Ready for Reliable CMP Support? Let’s Get Started.
Whether you need emergency service, a refurbishment quote, or parts for a legacy system, Zyon Technologies provides ISO-certified expertise and personal service you can count on.