Comprehensive CMP Equipment Service and Support
Zyon Technologies delivers complete lifecycle support for CMP and post-CMP tools — from installation and on-site service to refurbishments, engineering upgrades, and spare parts supply.
With ISO 9001:2015 certified processes and an ISO 7 cleanroom facility, we ensure every project meets the highest quality standards while minimizing downtime and cost of ownership.
Whether you need a quick repair, full system rebuild, or legacy tool solution, our team is ready to respond — locally or globally.
On-Site Service & Repairs
Responsive Field Service, Local or Global
Our experienced field service engineers provide fast, reliable support anywhere in the world.
Local service within 48 hours; nationwide support in under a week
Troubleshooting, preventive maintenance, and emergency repair
Experienced with all major CMP and post-CMP platforms
We understand that downtime costs money. That’s why we move quickly — and stay until the job is done.
Tool Installation & Refurbishment
OEM-Quality Installations and Refurbishments
Zyon offers system installation, configuration, and full refurbishments across a range of CMP polishers and cleaners.
Each refurbishment is performed in our ISO 7 cleanroom using documented ISO-certified processes to restore tools to OEM performance specifications.
Typical refurbishment turnaround: 8–10 weeks
Standard 90-day parts warranty, extended options available
Tailored service levels based on tool age and condition
Spare Parts & Consignment Programs
Large In-Stock Inventory + Global Sourcing Network
We maintain an extensive inventory of OEM-quality CMP parts and consumables, with the ability to source rare or discontinued components through our trusted global network.
In-stock components for Applied Materials, Speedfam, IPEC, Auriga, OnTrak, and Strasbaugh tools
Onsite consignment and repair-loop programs available to reduce cost of ownership
90-day warranty with extended warranties available on most parts
If you need it, we can get it — fast.
Component Manufacturing & Refurbishment
Rebuild. Reuse. Restore.
Our in-house machine shop and engineering team specialize in re-manufacturing and reconditioning key CMP subassemblies:
Gearboxes, polish arms, flipper boxes, platens, and bearings
HCLU, X-Track, and sweep assemblies
Robotic systems including Genmark, Equipe, Asyst, Yaskawa/Motoman, and Hine
Every component is rebuilt to OEM specifications, tested, and documented for traceability and reliability.
Engineering & Sustaining Services
Mechanical and Electrical Engineering Expertise
Our engineers provide design and upgrade solutions that extend equipment life and reduce maintenance costs.
Mechanical and electrical engineering for all supported tools
Obsolescence management and part requalification
Custom upgrades to improve reliability and performance
From small component redesigns to complete system overhauls, our engineering team ensures your tools keep pace with your production goals.
Process Support & Training
Empowering Your Team Through Knowledge
Zyon offers hands-on CMP training for tool operation, safety, and maintenance.
Training can be conducted on-site or at our Chandler facility, depending on tool configuration.
For advanced CMP process development, we collaborate with trusted partners like Kothar to provide specialized expertise.
Obsolescence & Legacy Tool Solutions
Support for Tools the OEMs No Longer Service
When manufacturers stop supporting older CMP platforms, Zyon steps in.
We provide parts, refurbishments, and engineering support to extend the life of legacy tools — helping fabs avoid costly upgrades and production interruptions.
If you’re struggling to maintain or source components for a discontinued system, talk to us — we’ve likely already solved that problem for another customer.
Supported Tool Sets
Experience Across Every Major CMP Platform
CMP Polishers / Cleaners:
Applied Materials: Mirra / Mirra Mesa / Reflexion
Speedfam IPEC: 372, 472, 676, 776
Auriga / Auriga-C / Auriga-EC
Strasbaugh 6EC / 6EG
Post-CMP Cleaners:
OnTrak (Lam): Series 0–III, Synergy, Integra
Additional Capabilities:
CMP consumables (wear rings, pad backers, carrier shims)
Robotics and automation systems
Mechanical & electrical engineering across all listed tools
Ready for Reliable CMP Support? Let’s Get Started.
Whether you need emergency service, a refurbishment quote, or parts for a legacy system, Zyon Technologies provides ISO-certified expertise and personal service you can count on.